Kuei-Hsien Chen
Advanced Materials Laboratory (AML)
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Structure and elastic properties of amorphous SiCN films
Citation:
Lehmann, G, Hess* P, Wu J-J, Wu CT, Chen KH, Chen LC, Lee H-Y. 2001. Structure and elastic properties of amorphous SiCN films. Phys. Rev.. B64:165305-(1-10).
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