@article {1492,
	title = {Structure and elastic properties of amorphous SiCN films},
	journal = {Phys. Rev.},
	volume = {B64},
	year = {2001},
	pages = {165305-(1-10)},
	author = {G. Lehmann and P. Hess* and J.-J. Wu and C. T. Wu and K. H. Chen and L. C. Chen and H.-Y. Lee}
}
