{\rtf1\ansi\deff0\deftab360 {\fonttbl {\f0\fswiss\fcharset0 Arial} {\f1\froman\fcharset0 Times New Roman} {\f2\fswiss\fcharset0 Verdana} {\f3\froman\fcharset2 Symbol} } {\colortbl; \red0\green0\blue0; } {\info {\author Biblio}{\operator }{\title Biblio RTF Export}} \f1\fs24 \paperw11907\paperh16839 \pgncont\pgndec\pgnstarts1\pgnrestart Lehmann, G, Hess* P, Wu J-J, Wu CT, Chen KH, Chen LC, Lee H-Y.? 2001.??Structure and elastic properties of amorphous SiCN films. Phys. Rev.. B64:165305-(1-10).\par \par }