Morphology control of Si nanotips fabricated by electron cyclotron resonance plasma etching
- Citation:
- Hsu, CH, Huang YF, Chen LC, Chattopadhyay* S, Chen KH, Lo HC, Chen CF.
2006. Morphology control of Si nanotips fabricated by electron cyclotron resonance plasma etching. J. Vac. Sci. Technol. . B24:308-311.
