{\rtf1\ansi\deff0\deftab360 {\fonttbl {\f0\fswiss\fcharset0 Arial} {\f1\froman\fcharset0 Times New Roman} {\f2\fswiss\fcharset0 Verdana} {\f3\froman\fcharset2 Symbol} } {\colortbl; \red0\green0\blue0; } {\info {\author Biblio}{\operator }{\title Biblio RTF Export}} \f1\fs24 \paperw11907\paperh16839 \pgncont\pgndec\pgnstarts1\pgnrestart Hsu, CH, Huang YF, Chen LC, Chattopadhyay* S, Chen KH, Lo HC, Chen CF.? 2006.??Morphology control of Si nanotips fabricated by electron cyclotron resonance plasma etching. J. Vac. Sci. Technol. . B24:308-311.\par \par }