@article {1592,
	title = {Morphology control of Si nanotips fabricated by electron cyclotron resonance plasma etching},
	journal = {J. Vac. Sci. Technol. },
	volume = {B24},
	year = {2006},
	pages = {308-311},
	author = {C.H. Hsu and Y.F. Huang and L. C. Chen and S. Chattopadhyay* and K. H. Chen and H.C. Lo and C.F. Chen}
}
