X-ray-absorption of Si-C-N thin films: acomparison between crystalline and amorphous phases
- Citation:
- Chang, YK, Hsieh HH, Pong WF, Tsai MH, Dann TE, Chien FZ, Tseng PK, Chen LC, Wei SL, Chen KH, Wu JJ, Chen YF.
1999. X-ray-absorption of Si-C-N thin films: acomparison between crystalline and amorphous phases. J. Appl. Phys.. 86:5609-5613.
