@article {1472,
	title = {X-ray-absorption of Si-C-N thin films: acomparison between crystalline and amorphous phases},
	journal = {J. Appl. Phys.},
	volume = {86},
	year = {1999},
	pages = {5609-5613},
	author = {Y.K. Chang and H.H. Hsieh and W.F. Pong and M.H. Tsai and T.E. Dann and F.Z. Chien and P.K. Tseng and L. C. Chen and S.L. Wei and K. H. Chen and J.J. Wu and Y.F. Chen}
}
