Sputtering Process of Carbon Nitride Films by Using a Novel Bio-Molecular C-N Containing Target
- Citation:
- Lu, TR, Chen LC, Chen KH, Bhusari DM, Chen TM, Kuo CT.
1998. Sputtering Process of Carbon Nitride Films by Using a Novel Bio-Molecular C-N Containing Target. Thin Solid Films. 332:74.
