@article {1229,
	title = {Sputtering Process of Carbon Nitride Films by Using a Novel Bio-Molecular C-N Containing Target},
	journal = {Thin Solid Films},
	volume = {332},
	year = {1998},
	pages = {74},
	author = {T.R. Lu and L. C. Chen and K. H. Chen and D. M. Bhusari and T.M. Chen and Kuo, C. T.}
}
