Spectroscopic ellipsometry analysis of silicon nanotips obtained by electron cyclotron resonance plasma etching
- Citation:
- Mendoza-Galván*, A, Järrendahl K, Arwin H, Huang Y-F, Chen LC, Chen KH.
2009. Spectroscopic ellipsometry analysis of silicon nanotips obtained by electron cyclotron resonance plasma etching. Applied Optics. 48:4996-5004.
