@article {1660,
	title = {Spectroscopic ellipsometry analysis of silicon nanotips obtained by electron cyclotron resonance plasma etching},
	journal = {Applied Optics},
	volume = {48},
	year = {2009},
	pages = {4996-5004},
	author = {Arturo Mendoza-Galv{\'a}n* and Kenneth J{\"a}rrendahl and Hans Arwin and Yi-Fan Huang and L. C. Chen and K. H. Chen}
}
