Phase and thickness dependence of thermal diffusivity in SiCxNy and BCxNy,
- Citation:
- Chattopadhyay, S, Chen* LC, Chien SC, Lin ST, Wu CT, Chen KH.
2002. Phase and thickness dependence of thermal diffusivity in SiCxNy and BCxNy,. Thin Solid Films. 420:205-211.
