@article {1520,
	title = {Phase and thickness dependence of thermal diffusivity in SiCxNy and BCxNy,},
	journal = {Thin Solid Films},
	volume = {420},
	year = {2002},
	pages = {205-211},
	author = {S. Chattopadhyay and L.C. Chen* and S. C. Chien and S.T. Lin and C. T. Wu and K. H. Chen}
}
