Methylamine growth of SiCN films using ECR-CVD

Citation:
Wen, CY, Wu JJ, Lo HJ, Chen LC, Chen KH, Lin ST, Yu Y-C, Wang C-W, Lin E-K.  2000.  Methylamine growth of SiCN films using ECR-CVD. Mat. Res. Soc. Symp.. :606,115-120.