@proceedings {1484,
	title = {Methylamine growth of SiCN films using ECR-CVD},
	journal = {Mat. Res. Soc. Symp.},
	year = {2000},
	pages = {606, 115-120},
	author = {C.Y. Wen and J.J. Wu and H.J. Lo and L. C. Chen and K. H. Chen and S.T. Lin and Y.-C. Yu and C.-W. Wang and E.-K. Lin}
}
