Effect of substrate bias on the promotion of nanocrystalline silicon growth from He-diluted SiH4plasma at low temperature
- Citation:
- Das, D, Raha D, Chen WC, Chen KH, Wu CT, Chen LC.
2012. Effect of substrate bias on the promotion of nanocrystalline silicon growth from He-diluted SiH4plasma at low temperature. J. Mater. Res.. 27:1303.
