@article {1741,
	title = {Effect of substrate bias on the promotion of nanocrystalline silicon growth from He-diluted SiH4plasma at low temperature},
	journal = {J. Mater. Res.},
	volume = {27},
	year = {2012},
	pages = {1303},
	author = {D. Das and D. Raha and W.C. Chen and K. H. Chen and C. T. Wu and L. C. Chen}
}
