Effect of carbon sources on SiCN films growth in an electron cyclotron resonance plasma chemical vapor deposition reactor
- Citation:
- Wu, JJ, Chen KH, Wen C-Y, Chen LC, Lo HJ, Lin ST.
2000. Effect of carbon sources on SiCN films growth in an electron cyclotron resonance plasma chemical vapor deposition reactor. Diamond & Related Materials. 9:556-561.
