@article {1479,
	title = {Effect of carbon sources on SiCN films growth in an electron cyclotron resonance plasma chemical vapor deposition reactor},
	journal = {Diamond \& Related Materials},
	volume = {9},
	year = {2000},
	pages = {556-561},
	author = {J.J. Wu and K. H. Chen and C.-Y. Wen and L. C. Chen and H.J. Lo and S.T. Lin}
}
