Doping and electrical properties of amorphous silicon carbon nitride films | Kuei-Hsien Chen

Doping and electrical properties of amorphous silicon carbon nitride films

Citation:: Chou, YC, Chattopadhyay S, Chen* LC, Chen YF, Chen KH. 2003. Doping and electrical properties of amorphous silicon carbon nitride films. Diamond & Related Materials. 12:1213-1219.