@article {1535,
	title = {Doping and electrical properties of amorphous silicon carbon nitride films},
	journal = {Diamond \& Related Materials},
	volume = {12},
	year = {2003},
	pages = {1213-1219},
	author = {Chou, Y. C. and S. Chattopadhyay and L.C. Chen* and Y.F. Chen and K. H. Chen}
}
