Kuei-Hsien Chen
Advanced Materials Laboratory (AML)
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Deposition of silicon carbon nitride by ion-beam sputtering
Citation:
Wu, JJ, Wu CT, Liao YC, Lu TR, Chen LC, Chen KH, Hwa LG, Kuo CT, Ling KJ. 1999. Deposition of silicon carbon nitride by ion-beam sputtering. Thin Solid Films. 355:417-422.
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