@article {1473,
	title = {Deposition of silicon carbon nitride by ion-beam sputtering},
	journal = {Thin Solid Films},
	volume = {355},
	year = {1999},
	pages = {417-422},
	author = {J.J. Wu and C. T. Wu and Y.C. Liao and T.R. Lu and L. C. Chen and K. H. Chen and L.G. Hwa and Kuo, C. T. and K.J. Ling}
}
