Affinity of Si-N and Si-C bond in the SiCN thin films - experimental and theoretical approaches
- Citation:
- Chen, CW, Huang CC, Lin YY, Chen LC, Chen KH.
2005. Affinity of Si-N and Si-C bond in the SiCN thin films - experimental and theoretical approaches. Diamond Relat. Mater.. 14:1126-1130.
