@article {1571,
	title = {Affinity of Si-N and Si-C bond in the SiCN thin films - experimental and theoretical approaches},
	journal = {Diamond Relat. Mater.},
	volume = {14},
	year = {2005},
	pages = {1126-1130},
	author = {C. W. Chen and C. C. Huang and Y. Y. Lin and L. C. Chen and K. H. Chen}
}
