The Use of a Bio-molecular Target for Crystalline Carbon Nitride Film Deposition by Ar Ion-Beam Sputtering without Other Source of Nitrogen
- Citation:
- Chen, LC, Lu TR, Bhusari DM, Wu JJ, Chen KH, Kuo CT, Chen TM.
1998. The Use of a Bio-molecular Target for Crystalline Carbon Nitride Film Deposition by Ar Ion-Beam Sputtering without Other Source of Nitrogen. Appl. Phys. Lett.. 72:3449.
