Thermal diffusivity in amorphous silicon carbon nitride thin films by the traveling wave technique
- Citation:
- Chattopadhyay, S, Chen* LC, Wu CT, Chen KH, Wu JS, Chen YF, Lehmann G, Hess P.
2001. Thermal diffusivity in amorphous silicon carbon nitride thin films by the traveling wave technique. Appl. Phys. Lett.. 79:332-334.
