Piezoreflectance study of a Fe-containing silicon carbon nitride crystalline film
- Citation:
- Hsieh, CH, Huang YS, Tiong KK, Fan CW, Chen YF, Chen LC, Wu JJ, Chen KH.
2000. Piezoreflectance study of a Fe-containing silicon carbon nitride crystalline film. J. Appl. Phys.. 87:280-284.