Photoconductivity and highly selective UV sensing features of amorphous silicon carbon nitride thin films | Kuei-Hsien Chen

Photoconductivity and highly selective UV sensing features of amorphous silicon carbon nitride thin films

Citation:: Chen*, CW, Huang CC, Lin YY, Su WF, Chen* LC, Chen KH. 2006. Photoconductivity and highly selective UV sensing features of amorphous silicon carbon nitride thin films. Appl. Phys. Lett.. 88:073515-(1-3).