Mechanical properties of amorphous boron carbon nitride films produced by dual gun sputtering | Kuei-Hsien Chen

Mechanical properties of amorphous boron carbon nitride films produced by dual gun sputtering

Citation:: Chien, SC, Chattopadhyay* S, Chen LC, Lin ST, Chen KH. 2003. Mechanical properties of amorphous boron carbon nitride films produced by dual gun sputtering. Diamond Relat. Mater. . 12:1463-1471.