Electronic and bonding structures of amorphous Si-C-N thin films by X-ray-absorption spectroscopy
- Citation:
- and H.M. Tsai, Jan CJ, Chiou JW, Pong* WF, Chen KH, et al.
2001. Electronic and bonding structures of amorphous Si-C-N thin films by X-ray-absorption spectroscopy. Appl. Phys. Lett.. 79:2393-2395.