Electronic and Atomic Structures of SiCN Thin Film by X-ray Absorption Spectroscopy and Theoretical Calculations
- Citation:
- Chang, YK, Hsieh HH, Pong WF, Tsai MH, Lee KH, Dann TE, Chien FZ, Tseng PK, Tsang KL, Su WK, Chen LC, Wei SL, Chen KH, Bhusari DM, Chen YF. 1998. Electronic and Atomic Structures of SiCN Thin Film by X-ray Absorption Spectroscopy and Theoretical Calculations. Phys. Rev.. B58:9018.
