Effect of target materials on crystalline carbon nitride films preparation by ion beam sputtering | Kuei-Hsien Chen

Effect of target materials on crystalline carbon nitride films preparation by ion beam sputtering

Citation:: Kuo, CT, Chen LC, Chen KH, Chen TM, Lu TR. 1999. Effect of target materials on crystalline carbon nitride films preparation by ion beam sputtering. Diamond & Related Materials. 8:1724-1729.