Effect of Target Materials on Crystalline Carbon Nitride Films Preparation by Ion Beam Sputtering | Kuei-Hsien Chen

Effect of Target Materials on Crystalline Carbon Nitride Films Preparation by Ion Beam Sputtering

Citation:: Kuo, CT, Chen LC, Chen KH, Chen TM, Lu TR. 1999. Effect of Target Materials on Crystalline Carbon Nitride Films Preparation by Ion Beam Sputtering. Diamond & Related Materials. 8:1724.