Effect of ozone cleaning and annealing on Ti/Al/Pt/Au ohmic contacts on GaN nanowires | Kuei-Hsien Chen

Effect of ozone cleaning and annealing on Ti/Al/Pt/Au ohmic contacts on GaN nanowires

Citation:: Chang, CY, Lan TW, Chi GC, Chen* LC, Chen KH, Chen JJ, Jang S, Ren F, Pearton SJ. 2006. Effect of ozone cleaning and annealing on Ti/Al/Pt/Au ohmic contacts on GaN nanowires. Electrochemical and Solid-State Lett.. 9:G155-G157.