Bonding characterization and nano-indentation study of the amorphous SiCxNy films with and without hydrogen incorporation | Kuei-Hsien Chen

Bonding characterization and nano-indentation study of the amorphous SiCxNy films with and without hydrogen incorporation

Citation:: Lo, HC, Wu JJ, Wen CY, Wong TS, Lin ST, Chen* KH, Chen LC. 2001. Bonding characterization and nano-indentation study of the amorphous SiCxNy films with and without hydrogen incorporation. Diamond Relat. Mater.. 10:1916-1920.