@article {1495,
	title = {Bonding characterization and nano-indentation study of the amorphous SiCxNy films with and without hydrogen incorporation},
	journal = {Diamond Relat. Mater.},
	volume = {10},
	year = {2001},
	pages = {1916-1920},
	author = {H.C. Lo and J.J. Wu and C.Y. Wen and T.S. Wong and S.T. Lin and K.H. Chen* and L. C. Chen}
}
