{\rtf1\ansi\deff0\deftab360 {\fonttbl {\f0\fswiss\fcharset0 Arial} {\f1\froman\fcharset0 Times New Roman} {\f2\fswiss\fcharset0 Verdana} {\f3\froman\fcharset2 Symbol} } {\colortbl; \red0\green0\blue0; } {\info {\author Biblio}{\operator }{\title Biblio RTF Export}} \f1\fs24 \paperw11907\paperh16839 \pgncont\pgndec\pgnstarts1\pgnrestart Lo, HC, Wu JJ, Wen CY, Wong TS, Lin ST, Chen* KH, Chen LC.? 2001.??Bonding characterization and nano-indentation study of the amorphous SiCxNy films with and without hydrogen incorporation. Diamond Relat. Mater.. 10:1916-1920.\par \par }