Bonding characterization, density measurement and thermal diffusivity studies of amorphous silicon carbon nitride and boron carbon nitride thin films
- Citation:
- Chattopadhyay, S, Chen* LC, Chien SC, Lin ST, Chen KH.
2002. Bonding characterization, density measurement and thermal diffusivity studies of amorphous silicon carbon nitride and boron carbon nitride thin films. J. Appl. Phys.. 92:5150-5158.
