@article {1522,
	title = {Bonding characterization, density measurement and thermal diffusivity studies of amorphous silicon carbon nitride and boron carbon nitride thin films},
	journal = {J. Appl. Phys.},
	volume = {92},
	year = {2002},
	pages = {5150-5158},
	author = {S. Chattopadhyay and L.C. Chen* and S. C. Chien and S.T. Lin and K. H. Chen}
}
