Field emission of nanostructured amorphous SiCN films deposited by reactive magnetron sputtering of SiC in CH4/N2atmosphere
- Citation:
- Lin, HY, Chen YC, Lin CY, Tong YP, Hwa LG, Chen KH, Chen* LC.
2002. Field emission of nanostructured amorphous SiCN films deposited by reactive magnetron sputtering of SiC in CH4/N2atmosphere. Thin Solid Films. 416:85-91.
