Formation of Crystalline Carbon Nitride Films by Microwave Plasma-Enhanced Chemical Vapor Deposition.
Citation:
Chen, LC, Yang CY, Bhusari DM, Chen KH, Lin MC, Lin J-C, Chuang TJ.
1996. Formation of Crystalline Carbon Nitride Films by Microwave Plasma-Enhanced Chemical Vapor Deposition.. Diamond Relat. Mater.. 5:514-518.
