{\rtf1\ansi\deff0\deftab360 {\fonttbl {\f0\fswiss\fcharset0 Arial} {\f1\froman\fcharset0 Times New Roman} {\f2\fswiss\fcharset0 Verdana} {\f3\froman\fcharset2 Symbol} } {\colortbl; \red0\green0\blue0; } {\info {\author Biblio}{\operator }{\title Biblio RTF Export}} \f1\fs24 \paperw11907\paperh16839 \pgncont\pgndec\pgnstarts1\pgnrestart Wu, JJ, Chen KH, Wen CY, Chen* LC, Yu Y-C, Wang C-W, Lin E-K.? 2001.??Effect of dilution gas on SiCN films growth using methylamine. Materials Chemistry and Physics. 72:240-244.\par \par }