{\rtf1\ansi\deff0\deftab360 {\fonttbl {\f0\fswiss\fcharset0 Arial} {\f1\froman\fcharset0 Times New Roman} {\f2\fswiss\fcharset0 Verdana} {\f3\froman\fcharset2 Symbol} } {\colortbl; \red0\green0\blue0; } {\info {\author Biblio}{\operator }{\title Biblio RTF Export}} \f1\fs24 \paperw11907\paperh16839 \pgncont\pgndec\pgnstarts1\pgnrestart Chen, LC, Yang CY, Bhusari DM, Chen KH, Lin MC, Lin JC, Chuang TJ.? 1996.??Formation of Crystalline Silicon Carbon Nitride Films by Microwave Plasma-Enhanced CVD. Diamond and Related Materials. 5:514.\par \par }