@article {1572,
	title = {A 5 nm ruthenium thin film as a directly plate-able copper diffusion barrier},
	journal = {Appl. Phys. Lett.},
	volume = {86},
	year = {2005},
	pages = {083104-(1-3)},
	author = {T. N. Arunagiri, , , ,,,, and and Y. Zhang and O. Chyan* and M. El-Bounani and M. J. Kim and C. T. Wu and L. C. Chen and K. H. Chen}
}
