@article {1503,
	title = {Ion beam sputtered growth and mechanical properties of SiCN films},
	journal = {J. of Mater. Sci. and Engineering},
	volume = {33},
	year = {2001},
	pages = {38},
	author = {C.T. Wang and K.J. Ma* and K. H. Chen and L. C. Chen and P. D. Kichambare}
}
