@article {1501,
	title = {Effect of dilution gas on SiCN films growth using methylamine},
	journal = {Materials Chemistry and Physics},
	volume = {72},
	year = {2001},
	pages = {240-244},
	author = {J.J. Wu and K. H. Chen and C.Y. Wen and L.C. Chen* and Y.-C. Yu and C.-W. Wang and E.-K. Lin}
}
