@article {1207,
	title = {Formation of Crystalline Silicon Carbon Nitride Films by Microwave Plasma-Enhanced CVD},
	journal = {Diamond and Related Materials},
	volume = {5},
	year = {1996},
	pages = {514},
	author = {L. C. Chen and Yang, C. Y. and D. M. Bhusari and K. H. Chen and M. C. Lin and Lin, J. C. and T. J. Chuang}
}
