@article {1201,
	title = {Temperature and Density Distribution of H2 and H in Hot Filament CVD of Diamond Films},
	journal = {J. Appl. Phys.},
	volume = {71},
	year = {1992},
	pages = {1485},
	author = {K. H. Chen and M.C. Chuang and M. Penney and W. F. Banholzer}
}
